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Hierarchical patterning by multi-step micro-imprinting with layered materials

Fujio Tsumori, Lijan Shen, Toshiko Osada and Hideshi Miura

Manufacturing Rev., 2 (2015) 10

Published online: 01 May 2015

DOI: 10.1051/mfreview/2015008

Fujio Tsumori

Lijan Shen

Toshiko Osada

Hideshi Miura

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