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Schematic plots of (a) OT, (b) SL, and (c) TL stacking sequences. Upper part shows top view and lower part side view. The interfaces between N1-terminated VN and Ti-terminated TiN are given only. For top views, only the Ti layer nearest to the interface is shown for clarity. The view direction for bottom panels is along  and the location of interface is marked with horizontal dotted lines. The top and bottom portions of the interface have been omitted.
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