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Table 3.

Input mechanical properties of specimens and FE simulation conditions.

Specimen Ti Back plate (SUS)
Mass density (mg/μm) 4.5 × 10−9 7.9 × 10−9
Young’s modulus (GPa) 110 171
Yield stress (MPa) 330 292
Poisson’s ratio 0.34 0.28
Friction coefficient 0.1

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