Open Access

Table 10

Optimal polishing parameters according to ANOVA and OCMNO analysis.

Optimize polishing mode Workpiece speed n1 AP diameter CIP diameter Magnet speed n2
Ra optimize by ANOVA 300 rpm 1 μm 6 μm 60 rpm
Ra optimize by OCMNO 318.65 rpm 1.5 μm 4.5 μm 52.17 rpm
MRR optimize by ANOVA 900 rpm 5 μm 6 μm 60 rpm
MRR optimize by OCMNO 832.67 rpm 4.5 μm 7.5 μm 58.33 rpm

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