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Figure 21.


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3D-surface analysis. Surface fractions as function of vertical penetration for a measurement area of 2.4 mm × 2.4 mm; (a) exemplary presentation, (b) distribution of surface fractions (RCA, black; CLPs, white; OLPs, grey) at a penetration depth of 4 μm for a cut-out of 1 mm × 1 mm [10].

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