| Issue |
Manufacturing Rev.
Volume 4, 2017
|
|
|---|---|---|
| Article Number | 7 | |
| Number of page(s) | 9 | |
| DOI | https://doi.org/10.1051/mfreview/2017006 | |
| Published online | 02 June 2017 | |
Research Article
Advanced characterization of by-product carbon film obtained by thermal chemical vapor deposition during CNT manufacturing
RNanolab, School of Chemical Engineering, National Technical University of Athens, Heroon Polytechneiou Street, Zografos, Athens
15780, Greece
* e-mail: charitidis@chemeng.ntua.gr
Received:
9
December
2016
Accepted:
23
February
2017
This study is focused on the investigation of the morphology and the characteristics of carbon films, obtained by thermal chemical vapor deposition (T-CVD) on different substrates, during carbon nanotubes (CNTs) manufacturing. These films were examined, by means of optical and electronic microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. Additional measurements were conducted related with the estimation of their nanomechanical properties. The topography is studied, in combination with the assessment of their mechanical behavior at nanoscale. Through nanoindentation, hardness and elastic modulus together with wear resistance index (H/E) were evaluated. According to this study, it may be remarked that the obtained film is classified as an amorphous carbon film.
Key words: Carbon coatings / Thin films / Chemical vapor deposition / Advanced characterization / Nanomechanical properties
© A.-F.A. Trompeta et al., published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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