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Home All issues Volume 7 (2020) Manufacturing Rev., 7 (2020) 37 References
Open Access
Issue
Manufacturing Rev.
Volume 7, 2020
Article Number 37
Number of page(s) 10
DOI https://doi.org/10.1051/mfreview/2020035
Published online 23 November 2020
  1. A. Daridon, V. Fascio, J. Lichtenberg et al., Fresenius, J. Anal. Chem. 371 (2001) 261–269 [Google Scholar]
  2. D. Petersen, K. Mogensen, H. Klank, Glass micromachining. Microsystem engineering of Lab-on-a-Chip devices (Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, 2004) [Google Scholar]
  3. R. Tölke et al., Processing of Foturan® glass ceramic substrates for micro-solid oxide fuel cells, J. Eur. Ceram. Soc. 32 (2012) 3229–3238 [CrossRef] [Google Scholar]
  4. C. Thierry, E. Peter, S. Göran, Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask, J. Micromech. Microeng. 8 (1998) 84 [CrossRef] [Google Scholar]
  5. Y. Mourzina, A. Steffen, A. Offenhäusser, The evaporated metal masks for chemical glass etching for BioMEMS. Vol. 11 . (2005), 135–140 [Google Scholar]
  6. X. Li, T. Abe, M. Esashi, Deep reactive ion etching of Pyrex glass using SF6 plasma, Sens. Actuat. A 87 (2001) 139–145 [CrossRef] [Google Scholar]
  7. S. Nikumb, Q. Chen, C. Li, H. Reshef, H. Y. Zheng, H. Qiu, D. Low, Precision glass machining, drilling, and profile cutting by short pulse lasers, Thin Solid Films 477 (2005) 216–221 [CrossRef] [Google Scholar]
  8. P. J. Slikkerveer, P. Bouten, High quality mechanical etching of brittle materials by powder blasting. Sens. Actuat. A Phys. 85 (2000) 296–303 [CrossRef] [Google Scholar]
  9. J.A. Plaza et al., Definition of high aspect ratio glass columns, Sens. Actuat. A Phys. 105 (2003) 305–310 [CrossRef] [Google Scholar]
  10. H.-M. Chow et al., Study of added powder in kerosene for the micro-slit machining of titanium alloy using electro-discharge machining, J. Mater. Process. Technol. 101 (2000) 95–103 [CrossRef] [Google Scholar]
  11. S.K. Sahu et al., Effect of using SiC powder-added dielectric media during electro-discharge machining of Inconel 718 superalloys, J. Braz. Soc. Mech. Sci. Eng. 40 (2018) 330 [CrossRef] [Google Scholar]
  12. A. Batish, A. Bhattacharya, N. Kumar, Powder Mixed Dielectric: An Approach for Improved Process Performance in EDM, Part. Sci. Technol. 33 (2015) 150–158 [CrossRef] [Google Scholar]
  13. S. Kumar, K. Pr, NANO POWDER MIXED ECM OF INCONEL 718 USING ANFIS AND RSM. 2020 [Google Scholar]
  14. R.O.V. Balwinder Singh, Vikas Sheel, Machining of Borosilicate Glass with ECDM using different abrasives. Int. Res. J. Eng. Technol. 04 (2017) 2533–2541 [Google Scholar]
  15. C.T. Yang et al., Improving machining performance of wire electrochemical discharge machining by adding SiC abrasive to electrolyte, Int. J. Mach. Tools Manuf. 46 (2006) 2044–2050 [CrossRef] [Google Scholar]
  16. P. Maillard et al., Geometrical characterization of micro-holes drilled in glass by gravity-feed with spark assisted chemical engraving (SACE), J. Micromech. Microeng. 17 (2007) 1343 [CrossRef] [Google Scholar]
  17. Z. Zhi-Ping et al., 3D microstructuring of Pyrex glass using the electrochemical discharge machining process, J. Micromech. Microeng. 17 (2007) 960 [CrossRef] [Google Scholar]
  18. P.K. Gupta, A. Dvivedi, P. Kumar, Effect of Pulse Duration on Quality Characteristics of Blind Hole Drilled in Glass by ECDM, Mater. Manuf. Process. 31 (2016) 1740–1748 [CrossRef] [Google Scholar]
  19. C. Chih-Ping et al., Magnetic field-assisted electrochemical discharge machining, J. Micromech. Microeng. 20 (2010) 075019 [CrossRef] [Google Scholar]
  20. H. Min-Seop, M. Byung-Kwon, L. Sang Jo, Geometric improvement of electrochemical discharge micro-drilling using an ultrasonic-vibrated electrolyte, J. Micromech. Microeng. 19 (2009) 065004 [CrossRef] [Google Scholar]
  21. H. Chao-Ching, D.-S.W.C. Jia-Chang, Flow-jet-assisted electrochemical discharge machining for quartz glass based on machine vision, Measurement 128 (2018) 71–83 [CrossRef] [Google Scholar]
  22. F. Mehrabi et al., Application of electrolyte injection to the electro-chemical discharge machining (ECDM) on the optical glass, J. Materials Process. Technol. 255 (2018) 665–672 [CrossRef] [Google Scholar]
  23. Y. Xu et al., Experimental investigation of magnetohydrodynamic effect in electrochemical discharge machining, Int. J. Mech. Sci. 142-143 (2018) 86–96 [CrossRef] [Google Scholar]
  24. V.K. Jain, Fabrication of Microchannels in Ceramics (Quartz) Using Electrochemical Spark Micromachining (ECSMM), J. Adv. Manuf. Syst. 13 (2014) 5–16 [CrossRef] [Google Scholar]
  25. R. Wuthrich, V. Fascio, Machining of non-conductive materials using electrochemical discharge phenomenon- an overview, Int. J. Mach. Tools Manuf. 45 (2005) 1095–1108 [CrossRef] [Google Scholar]
  26. Y. Xu et al., Investigation of micro-drilling using electrochemical discharge machining with counter resistant feeding, J. Mater. Process. Technol. 257 (2018) 141–147 [CrossRef] [Google Scholar]
  27. M. Jalali, P. Maillard, R. Wüthrich, Toward a better understanding of glass gravity-feed micro-hole drilling with electrochemical discharges, J. Micromech. Microeng. 19 (2009) 045001 [CrossRef] [Google Scholar]
  28. Z. Zhi-Ping et al., The tool geometrical shape and pulse-off time of pulse voltage effects in a Pyrex glass electrochemical discharge microdrilling process, J. Micromech. Microeng. 17 (2007) 265 [CrossRef] [Google Scholar]
  29. S.K. Jui, A.B. Kamaraj, M.M. Sundaram, High aspect ratio micromachining of glass by electrochemical discharge machining (ECDM), J. Manuf. Process. 15 (2013) 460–466 [CrossRef] [Google Scholar]

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