This article has an erratum: [https://doi.org/10.1051/mfreview/2015016]
Volume 2, 2015
|Number of page(s)||6|
|Published online||25 March 2015|
The influences of filament temperature on the structure of boron nitride films and its tribological characterization for microforming die application
Graduate School of System Design, Tokyo Metropolitan University, Hino
2 Japan Advanced Chemicals, 3131-4 Tana, Chuo-ku, Segamihara-shi, Kanagawa 252-0244, Japan
* e-mail: firstname.lastname@example.org
Accepted: 24 February 2015
Boron nitride film was deposited on 〈1 0 0〉-oriented silicon substrate by hot filament assisted chemical vapor deposition. The B[N(CH3)2]3 (Tris(dimetylamino)borane, TDMAB) was used as the single source precursor both for boron and nitride, and ammonia gas was used as the extra source to increase the N concentration in the films. Elemental composition of the films deposited under different filament temperatures were measured by energy dispersive X-ray (EDX) analysis, and the structure of the films were measured by X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FT-IR). The boron nitride films deposited under lower filament temperature was amorphous, while BN films contain hexagonal structure were deposited at higher filament temperature. To verify whether the films can be applied to the microforming die, a ball on disk test was carried out using pure titanium ball as the counterpart to investigate the interfacial behavior between the films and pure titanium. The results show that the reaction between the films and pure titanium was low as there was no titanium adhesion on the wear track when the film was remained.
Key words: Filament temperature / Boron nitride / Structure / Tribology / Microforming
© Y. Jin et al., Published by EDP Sciences, 2015
This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.